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Our Technologies

Microtechnologies for Small and Medium-Sized Enterprises

5microns offers you a comprehensive range of microtechnologies and utilizes a state-of-the-art cleanroom to realize your individual microsystem from concept to mass production.

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180+ Customers Across Various Industries

Our Comprehensive Technology Catalog

We design, develop, characterize, and manufacture microsystems from idea to series production. To always achieve the best result for you and create innovative processes, we utilize a wide range of microsystem technologies. In the cleanroom of the Center for Micro- and Nanotechnologies (ZMN) at TU Ilmenau (Shared Lab), we apply these technologies and process sequences individually according to your requirements.

At a Glance
  • 5microns offers you access to a comprehensive range of microtechnologies
  • State-of-the-art cleanroom with over 1200 m² of laboratory space at the Center for Micro- and Nanotechnologies (ZMN) of TU Ilmenau (Shared Lab)
  • From lithography, wet & dry etching to coating, backend, and analytics, we cover all technologies for your individual microsystem and your process chain.
  • Our experts are happy to develop all processes and prototypes together with you.


Lithography is the key technology of microsystem technology. It enables the local processing of substrates or layers on them. In lithography, a layer of photosensitive resist is exposed through a mask (local shading), transferring the mask’s structures to the resist. This structured resist then serves as a mask in subsequent process steps, i.e., to protect underlying material layers. Lithography is an extremely versatile method and, as a key technology, has enabled advancements in semiconductor manufacturing, microelectronics, optoelectronics, and other high-tech areas.

Wet Etching

Wet etching is a process where selective material removal is achieved using liquid process media. This process is applied in combination with lithography on various materials such as metals, glasses, and silicon to create etched figures or patterns. The selective material removal occurs through chemical or electrochemical reactions, dissolving and thus removing the material in contact with the etch medium. This method is used in many applications including microsystem technology, semiconductor manufacturing, optics, and other industrial sectors to produce precise structures or patterns in materials.

Dry Etching

Dry etching is a process where selective material removal is achieved using gaseous process media, typically in a vacuum chamber. A plasma is generated to initiate the chemical reaction between the gaseous media and the material to be etched. Dry etching is an important step in the manufacturing of semiconductor devices and microsystems where high-precision structures are required.

Microsystems on Your Behalf

We are your reliable partner for customized microsystems. From conception to manufacturing, we provide comprehensive support. Our experts collaborate with you for your success.

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Coating technologies are additive processes where material is deposited or applied to the surface of a substrate. Various methods are available for coating, depending on the specific requirements and desired outcome. Vapor deposition processes, including chemical vapor deposition (CVD) and physical vapor deposition (PVD), are among the most important coating technologies. Metallic or dielectric layers are frequently deposited.


Backend processes refer to all steps that follow the manufacture of chips (dies) on a wafer level. These processes are crucial for further processing of the chips on the wafer into functional (electronic) components used in products like processors, microcontrollers, sensors, and other electronic devices. Backend processes are essential to ensure and verify the quality and reliability of electronic components and that they meet the specific requirements of an application.


Analytics encompasses all technologies and procedures for measuring and monitoring the (intermediate) results of a manufacturing process. Analysis is crucial to ensure quality, precision, and reproducibility in manufacturing. In microsystem technology, analytics enable process monitoring, adherence to quality standards, and early detection and resolution of issues.

5microns as Your Technological One-Stop-Shop

5microns provides comprehensive access to cleanroom technologies, especially for small and medium-sized enterprises. We design, develop, characterize, and manufacture microsystems using technologies from lithography, wet & dry etching, coating, backend processes, and analytics. With an eye for detail, we are available for your project. Contact us for customized microsystem solutions.

Lars Dittrich
Dipl.-Ing. Lars Dittrich

5microns GmbH
Margarethenstr. 6
98693 Ilmenau

Phone: +49 3677-799639-0
Fax: +49 3677-799639-1


5microns provides a comprehensive range of microtechnologies, including lithography, wet & dry etching, coating, backend processes, and analytics, to create innovative solutions for the individual requirements of our customers. In terms of materials, the portfolio includes silicon-based microsystems as well as the processing of glasses and LTCC-based microsystems.

5microns offers customized microsystem solutions for small and medium-sized enterprises to meet their specific technological requirements, develop innovative products, and provide access to the necessary high technologies.

5microns utilizes the state-of-the-art cleanroom at the Center for Micro- and Nanotechnologies (ZMN) of TU Ilmenau, facilitating the realization of microsystems from conception to mass production as part of a Shared Lab.

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