5microns GmbH, which designs, develops, characterizes and manufactures microsystems from the idea to series production, will be represented with four contributions at the MikroSystemTechnik Kongress 2021 in Ludwigsburg near Stuttgart from 8th to 10th November 2021.
We are delighted to participate in this important industry meeting with four contributions this year. 5microns will present the patented micropump based on the EWOD effect “E-PunCh” to a broad public and launch it to the market at the MikroSystemTechnik Kongress 2021. Two posters will present the microfluidic product to interested parties and explain the underlying technology. Our employees Sebastian Bohm and Hai Binh Phi will be available for discussions. Furthermore, 5microns GmbH will present a model for the simulation of a gas sensor system that couples electromagnetic, fluid mechanical and thermodynamic physics in photoacoustic phenomena. Thomas Handte will also give a talk on the implementation of a two- and three-layer resist system to fabricate nanostructures with high aspect ratios at the wafer level. The results were developed in cooperation with the TU Ilmenau and micro resist technology GmbH.
All four publications can be read as a part of the conference book following up to the MikroSystemTechnik Congress 2021. The 5microns team is looking forward to exchanging ideas with you at the MikroSystemTechnik Kongress 2021 and to present current technological developments in the MEMS field.