The 5microns GmbH is the exclusive European distributor of Gdnano Ltd., a leading Chinese manufacturer of tools for nanoimprint lithography (NIL) processes.

Official distributor ofGDnano_Logo_nachbearbeitet

Machines for nanoimprint lithography

  • UN-nanoimprint lithography with soft stamps
    (soft UV-NIL)
  • Substrate sizes from 2 inch to 8 inch wafers and customer-specified solutions
  • Optical alignment option, resolution 1 µm
  • For research and development

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Resists, and masters

  • NIL resists for feature sizes down to 10 nm
  • Standard and customer-specified masters

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