The resists can be applied to a variety of substrate materials (silicon, glass, metals, and ceramics) and thus provide solutions for all kinds of applications. A structural accuracy of less than 10 nm is achievable with all available resists. Resist thickness can be adjusted precisely by spin coating from 25 nm up to 1500 nm. PDMS or XPDMS stamps are best suited for our resists.
Structure fidelity down to 10 nm
Standard resist "NIL-UV-Solid" and
fast curing resist "NIL-UV-Fast" available
Resist thickness between 25 nm and 1500 nm
Silicon, Glass (Borofloat, quartz),
metals, and ceramics